The Institute for Electronics and Nanotechnology (IEN) at Georgia Tech will offer a short course on microfabrication from March 21 - 22, 2024. This intensive two-day short course combines classroom lectures and laboratory-based hands-on fabrication in the IEN cleanroom. The goal of the course is to impart a basic understanding of the science and technology of microfabrication processes as used in academia and industry. This short course will cover essential microfabrication techniques including photolithography, thin film deposition, etching, packaging, and characterization. Attendees will gain valuable experience by fabricating simple devices in one of the most advanced university cleanrooms in North America.
Target Audience
Attendance is open to the general technical community and is not limited to current Georgia Tech students or IEN users. Anyone interested in cleanroom fabrication techniques is strongly encouraged to attend this course. The course is suitable for both new and experienced researchers interested in microfabrication techniques and applications. A course emphasis will be placed on IEN cleanroom resources, however, the concepts and techniques discussed are applicable to a broad array of research in this field.
Course Rates:
Georgia Tech Rate: $200
Academic and Government Rate: $400
Industry Rate: $800
*Rates include lunches on both days*
Agenda:
| Day 1 | Thursday, March 21, 2024 | |
| 7:30 a.m. - 8:00 a.m. | Registration and Breakfast |
| 8:00 a.m. - 8:15 a.m. | Course Introduction and Orientation |
| 8:15 a.m. - 9:00 a.m. | Photolithography Lecture Part 1 and Lab Session Overview |
| 9:00 a.m. - Noon | Lab Session (Marcus Inorganic Cleanroom) |
| Noon - 1:00 p.m. | Lunch |
| 1:00 p.m. - 2:00 p.m. | Photolithography Lecture Part 2 |
| 2:00 p.m. - 2:10 p.m. | Break |
| 2:10 p.m. - 3:10 p.m. | PVD Lecture |
| 3:10 p.m. - 4:00 p.m. | Lift-off in Cleanroom |
| 4:00 p.m. - 5:00 p.m. | 3D Printing Lecture |
| Day 2 | Friday, March 22, 2024 | |
| 8:00 a.m. - Noon | Lab Session |
| Noon - 1:00 p.m. | Lunch |
| 1:00 p.m. - 2:00 p.m. | CVD Lecture |
| 2:00 p.m. - 2:10 p.m. | Break |
| 2:10 p.m. - 3:10 p.m. | Etch Lecture |
| 3:10 p.m. - 3:20 p.m. | Break |
| 3:20 p.m. - 4:20 p.m. | Metrology Lecture |
| 4:20 p.m. - 5:00 p.m. | Summary |
* Program subject to revision
Dress Code
There is a mandatory dress code for access to the IEN clean room which must be adhered to.
Shoes: Socks or stockings are required. Shoes must be closed-toe shoes that fully enclose the heel and the top of the foot. Additionally, the shoes must not have a high heel (over one inch) or a deep cleat that may hold mud or other dirt. Also, your shoes must be clean and dry when you enter the facility.
Not Allowed: Sandals, open weave shoes, or shoes that expose the top of the foot.
Shirt: Your shirt must be at least a short sleeve shirt that is long enough to reach your pants (no bare midriffs) and it must not have a deep neckline.
Not Allowed: Tank tops, halter tops, and spaghetti strap tops.
Pants: Pants must be full-length, from waist to ankle.
Not Allowed: Shorts or short pants, tight pants. NO skirts or dresses.
Directions and Parking
Parking is not included in the cost of the course. If you are a visitor, and you would like to park on campus, you will need to use the pay-by-the hour visitor parking lot, located across from the Marcus Nanotechnology Building. We are also easily accessable via public transportation and Georgia Tech transportation services. Information on these services, and directions to Georgia Tech and IEN, can be found here.
Local Hotels
Contact:
Hang Chen
Institute for Electronics and Nanotechnology
hang.chen@ien.gatech.edu
404.894.3360